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• Carrier handoff sequence definitions and time diagrams (¶ 6
125 mm (5 in
2-0698 (Reapproved 0710) - Guide for Writing Sensor/Actuator Network (SAN) Standard Ballots
such as epitaxial layers
This report provides a summary and trends of this important market
E18400 - SEMI E184 - Specification for 300 mm Tape Frame FOUP Load Port Revision:SEMI E184-1221E - Superseded • Carrier handoff sequence definitions1 Purpose 1. 1 The purpose of this Specification is to define the basic interface dimensions of a load port on the semiconductor manufacturing equipment (SME), where a 300 mm Tape Frame FOUP can be loaded and unloaded. The intention of this Specification is to define a set of requirements and features to enable interoperability of load ports and Tape Frame FOUPs without limiting innovative solutions. 2 Scope 2. 1 The interface specification in this